Booth 30-36-37 | Raith
Raith is a leading provider and manufacturer of systems for nanofabrication, electron beam lithography, FIB-SEM nanofabrication, laser beam lithography, nanoengineering and reverse engineering. Founded in 1980 and headquartered in Dortmund, Germany, the company offers solutions for researchers and engineers in both academic and industry settings. With about 330 employees supporting customers in Europe, the Americas, Asia, and the Pacific region, Raith provides a professional support infrastructure that delivers added value to its customers. Raith counts high-level universities, academic institutions as well as companies in the high technology business among its clientele. For more information, please visit www.raith.com.
Booth 47 | Allresist
We develop, produce and distribute resists for optical and electron beam lithography, as well as respective process chemicals associated with these resists for the fabrication of electronic components. Our unique selling points are resist developments upon customer demands. Based on our high level of know-how and great flexibility, we are able to specifically produce technology-adapted resists cost-effectively within a short time.
Booth 17 | Heidelberg Instruments
Established in 1984, trusted in more than 50 countries with over 1,400 systems installed worldwide, Heidelberg Instruments is a global leader in design, development, and production of high-precision laser lithography systems, maskless aligners, and nanofabrication systems. Our tools range from tabletop solutions to high-end photomask manufacturing equipment and cater to a variety of needs. Our systems enable a broad spectrum of surface structuring on the micro- and nanoscale, including 2D-patterning, the creation of 2.5D features by Grayscale lithography, and 3D structuring through Two-Photon Polymerization. Due to their flexibility, our systems are valuable assets to the most renowned universities and R&D institutes worldwide, as well as industry production facilities. Typical fields of applications are in micro-optics and photonics, electronics, advanced packaging, quantum devices, MEMS, microfluidics, 2D materials, photomask production, and many others.
Booth 25 | JEOL (EUROPE) SAS
JEOL designs and manufactures scientific instruments for high-level research and development activities. JEOL products and services enable to pursue a variety of R&D applications that require high resolution imaging and analytical capabilities such as: basic observation and analysis, environmental science, information technology, semiconductor production, biotechnology, nanotechnology, and a broad range of industrial endeavors.
Experts involved in the studies of medicine, biology, biochemistry, agriculture, materials science, metallurgy, ceramics, chemistry, petroleum, pharmacy, semiconductors and electronic materials have been using JEOL products for more than 70 years. Our new products are easier-to-use than ever before and contribute to a high level of quality assurance and quality control during the production process.
Its fields of investigation are multiple: sample preparation (cross polisher, ion slicer), nanotechnology (SEM, TEM, Auger, FIB…), the environment, medicine, the life sciences (NMR, EPR, mass spectrometry…). With 3000 employees in more than 80 countries JEOL Ltd. is the world leader in electron microscopy. This position leads us to constantly innovate in bringing us closer to our customers through dynamic partnerships to meet the upcoming challenges.
For more details or information about any of our products, please watch on web site or contact JEOL office.
Booth 16 | Kloé
Benefitting from 23 years of experience, Kloe is a french direct laser writer and mask aligner manufacturer which offers the whole range of photolithography equipment:
Deployed more than 600 equipments in more than 50 countries around the world, photolithography machines by Kloe are perfectly adapted to answer needs and constraints of researchers and industrials in many fields like microfluidics, microelectronics, photonics, MEMS, semiconductor manufacturing…
Booth 29 | Beamfox
Beamfox Proximity provides state-of-the-art proximity effect correction and data preparation for electron-beam lithography in a user-friendly software package. Our extremely fast, reliable, and accurate core algorithm developed by researchers at the Niels Bohr Institute in Copenhagen enables researchers in nanotechnologies to accelerate their research. Beamfox Proximity is the most user-friendly proximity effect correction solution on the market and integrates seamlessly with electron-beam writers from major vendors and supports all electron-beam writers through layered GDS.
Booth 24 | Boston Micro Fabrication
Boston Micro Fabrication (BMF) enables highly precise, micro-scale 3D printing across healthcare, the life sciences, electronics, and machining industries. Using the company’s proprietary PμSL (Projection Micro Stereolithography) technology, the microArch system printers produce the industry’s most accurate and precise high-resolution 3D prints for product development, research, and industrial short run production. Founded in 2016, BMF has offices in Boston, Shenzhen, Chongqing and Tokyo with a research and development center in San Diego.
Booth 18 | GenISys
Based in Munich, Germany, with subsidiaries in Yokohama, Japan, San Francisco, USA and a development center in Urla Turkey, GenISys develops markets and supports flexible, high-performance software solutions for the optimization of micro- and nano- fabrication processes. Addressing the market for lithography and inspection, GenISys combines deep technical expertise in layout data processing, process modeling, correction and optimization with world class software engineering and a strong focus on ease of use for applications in IC prototyping, mask production, DfM development and MEMS. For electron- and laser beam direct write and mask manufacturing, our data preparation and proximity effect correction software helps to push the limits of technology. Since its foundation in 2005, GenISys has become a global market leader in the field of electron-beam lithography software and is expanding to related markets and applications.
As a company focused on customer service, GenISys delivers fast, highly dedicated support for application and development of needed functionality to meet demanding customer needs.
Booth 32 | IDONUS & Lyncée Tec SA
IDONUS
Founded in 2004, idonus (www.idonus.com) is a Swiss company specialized in the development and fabrication of special equipment for the MEMS and semiconductor industries.
Our product portfolio includes UV LED Exposure and Alignment Systems for Photolithography, IR microscope for wafer inspection, Vapour Phase chemical Etcher for silicon-based devices and other high-performance equipment.
One of idonus’ strengths lies in its ability to customize its products according to the needs of each client. The vertical integration of the company enables a fast prototyping and shorter lead times for the customer.
Lyncée Tec SA
Lyncée Tec SA (www.lynceetec.com) is the reference company in the field of 4D microscopy and of Quantitative Phase Imaging (QPI). Its unique technology, based on digital holography (DHM®), provides simultaneously high acquisition rate and interferometric resolution. It opens new quality control possibilities and novel research opportunities, enabling applications that were not possible before. Lyncée offers complete solutions, from sample handling to data analysis, in the field of micro production, semiconductor, micro-optics, ultrasonic transducers, watch industry, high content screening, and cell imaging.
Booth 07 | Nanoscribe GmbH & Co. KG
Nanoscribe is the pioneer and market leader in high-precision additive manufacturing. The medium-sized company develops and produces 3D printers and grayscale lithography systems as well as specially developed printing materials and application-specific solutions for various microfabrication applications. The specialist for additive manufacturing of high-precision structures and objects on the nano-, micro- and mesoscale was founded in 2007 as a spin-off of the Karlsruhe Institute of Technology (KIT) and is part of the BICO Group since June 2021. More than 4,000 users and operators at top universities and innovative companies worldwide benefit from the groundbreaking technology and application tailored solutions for 3D Microfabrication.
https://www.nanoscribe.com/en/products/
Booth 26 | UpNano
UpNano is a Vienna (Austria) based high-tech company with the focus on development, manufacturing and commercialization of high-resolution 3D-printers. The systems are based on 2-photon-polymerization which offer industry-leading speed and resolution down to 0.2 µm. UpNano is committed to providing customers with a holistic package of hardware, software and optimized printing materials, for the fabrication of polymeric microparts as well as the unique possibility of bioprinting in a native cell environment. Using UpNano’s cutting-edge technology makes it possible to print objects with sizes ranging from the sub-micrometer to the centimeter range and up to 40 mm in height – within times and precision never achieved before.
UpNano was founded in September 2018 as a spin off of the TU Wien and has since developed into an established provider of 3D printing systems for research facilities, universities and businesses worldwide.
Booth 27 | Vistec Electron Beam GmbH
As a long-standing equipment supplier, Vistec Electron Beam GmbH, Jena (Germany) is providing leading technology solutions for advanced electron-beam lithography. Based on the Variable Shaped Beam (VSB) principle, the electron-beam lithography systems are mainly utilized for industrial and advanced research applications, such as electron-beam direct write in semiconductor manufacturing, including compound semiconductor, direct write mask making as well as photonics and several new emerging markets.
Efficient data processing & innovative exposure strategies (e.g. Cell Projection) open up new applications, especially in the field of AR/VR.
Vistec’s technology features automated handling, as well as high flexibility, writing accuracy and productivity and therefore is suitable for prototyping and low volume production.
In addition to its production facility in Germany, Vistec maintains service & support centers in Asia Pacific, USA and Europe.
Booth 42 | Micromachines
Micromachines (ISSN 2072-666X) is an open access journal which provides an advanced forum for the science and technology of studies on micro/nano-scaled structures, materials, devices, systems as well as related micro- and nanotechnology from fundamental research to applications. It is indexed within Scopus, SCIE (Web of Science), and many other databases. Micromachines ranks Q2 in the JCR category of Mechanical Engineering. The average article processing time (from submission to publication) is about 35 days. Its latest Impact Factor is 3.4, and its 5-Year Impact Factor is 3.3.
https://www.mdpi.com/journal/micromachines
Booth 44 | ProSys
ProSys is the leading specialist in megasonic enhanced processing for single substrate and batch applications. With an install base of over 4000 systems, we help customers improve processes such as:
Operating parameters and transducer status of all ProSys systems are measured and controlled in real-time. Our ProSys MegPie‚Ñ¢ is the industry standard for sub 20 nm cleaning in high volume device manufacturing thanks to an unmatched cleaning efficiency and uniformity. Our direct batch systems help increase cleaning efficiency, throughput, and reduce tool downtime without the need for active cooling.
Booth 06 | PTS (Puces Technologies Semiconducteurs)
PTS (Puces Technologies Semiconducteurs) offers a wide business range in several sectors : the semiconductor, the optical disc and the solar energy (photovoltaïc). PTS is a dominant french player thanks to his experience, his know how and to the care quite particularly brought to its customer relationships in those activities : Commercial Travelling, Services, Logistics.
Booth 40 | SPS-International
Every day, you are being challenged, to create smaller and more powerful microchips in the cleanest and most cost-efficient way possible. With our expertise in wafer handling tools and wet process equipment, we offer you a wide range of semiconductor equipment products and customized solutions for all your major process steps. Do you want to extend the life-time of your process semiconductor equipment? Upgrade your CMP tool? SPS Europe works closely with OEM’s, Wafer Fabs and R&D institutes worldwide. Supported by our own full-time service engineers and our experienced sales staff we offer you >30 years of excellent wafer process technology know-how.
Our mission is to be your one-stop source for high value semiconductor production systems and consumables, used in semiconductor fabrication, MEMS & Biotechnology.
Booth 46 | amcoss systems
amcoss – Equipment, Engineering and Repair Services for Microsystems and Semiconductor Technology
amcoss GmbH, located in Feldkirch, Austria, is an innovative high-tech company operating in the semiconductor and microsystems-technology industry. More than 80% of all manufacturers of microchips and semiconductors for communications- and consumer electronics worldwide, as well as well-known research and development organizations are amongst our customers. Within our two company departments we are operating in a most efficient and productive manner.
Overview of company departments
amcoss systems
Facilities, systems, and components for semi- and fully automatic wafer processing in spin, spray and wet processes including ams PILOT process control software; heat exchangers and chillers:
coating, developing, cleaning, lift-off, etching, heating/cooling, HMDS, process software, temperature control. Plug-and-play systems for temperature monitoring in the microsystem and semiconductor industry as well as many other industrial fields.
Engineering & refurbishments of optical, mechanical, and mechatronical components for photolithography, RTP, CVD, EPI, metrology, and plasma:
i.e., lenses, filters, mirrors, reflectors, light guides, wafer-chucks, wafer-handlers, end-effectors, motor-controllers, reflector plates, Wafertec pumps, etc.
The company is the largest supplier for second source components for stepper optics in the world.
amcoss GmbH was formed in 2008 as owner-managed business and has since then been growing steadily. To enhance our business opportunities amcoss has been looking out for a strong partner and is now part of the LAB14 group based in Heidelberg, Germany, with more than 800 employees worldwide.
amcoss GmbH Leusbundtweg 49a 6800 Feldkirch
phone +43 5522 209 50
telefax +43 5522 209 50-9
Booth 22 | EV Group
EV Group (EVG) is a leading supplier of high-volume production equipment and process solutions for the manufacture of semiconductors, MEMS, compound semiconductors, power devices and nanotechnology devices.
A recognized market and technology leader in wafer-level bonding and lithography for advanced packaging and nanotechnology, EVG’s key products include wafer bonding, thin-wafer processing and lithography/nanoimprint lithography (NIL) equipment, photoresist coaters, as well as cleaning and inspection/metrology systems.
With state-of-the-art application labs and cleanrooms at its headquarters in Austria, as well as in North America and Asia, EVG is focused on delivering superior process expertise to its global R&D and production customer and partner base – from the initial development through to the final integration at the customer’s site.
Founded in 1980, EVG services and supports an elaborate network of global customers and partners all over the world, with more than 1300 employees worldwide and fully-owned subsidiaries in the U.S., Japan, South Korea, China, Taiwan and Malaysia.
Booth 13 | ForLab Verbund
The network “Forschungslabore Mikroelektronik Deutschland, ForLab“ (Research Laboratories Microelectronics Germany) links 14 universities with the focus on microelectronics research. The ForLab network develops new fields of research for future microelectronics and thus helps to strengthen Germany as a location for microelectronics.
The aim of this network is to consolidate the structures of cooperation between the research laboratories and to include additional universities. The creation of uniform guidelines for cleanrooms and laboratories will simplify access, particularly for small and medium-sized companies, start-ups, and research groups. The online platform “Competence Atlas” will present the available facilities, research, and teaching profiles as well as the universities’ industrial collaborations. Additionally, formats for student training and recruiting young talents carried out in cooperation by multiple universities will be piloted as examples of best practice. Those programs will be connected with national and European training initiatives, such as the Microelectronics Academy of the Research Factory Microelectronics Germany (Forschungsfabrik Mikroelektronik Deutschland, FMD).
Topics the network focusses on include atomic layer deposition, assembly and interconnection technology, integrated photonics, and micro- and nanotechnology integration.
Booth 23 | HETEROMERGE
HETEROMERGE stands for functional 3D microstructures. With our printhead system, miniaturized multi-material 3D prints become possible. We provide automated in situ material exchange for two-photon 3D laser printing. We enable perfect alignment, fast processing, and substrate-independent printing – all at the highest resolution down to the nanometer scale. We remove design, function, and production barriers in the world of tiny 3D structures and enable functional additive manufacturing from nano- to millimeter-scale, letting you focus on the design and function of your desired structures. Enabling our customers to implement their visions from prototyping to medium-scale production, we support them with system, material, and service solutions for the best multi-material printing experience. To achieve this, we augment the complete system integration of precision polymer components in optics, mechanics, fluidics and beyond.
Booth 14 | Impedanss
Impedans is a leading provider of direct plasma and RF sensors and plasma control applications which can be used to better understand plasma. Our line of products serves diverse applications in fundamental research, equipment design, calibration and test, process development and process control. We serve a wide range of industries such as semiconductor, vacuum coating, medical device, aerospace among many others.
Our products include bulk plasma sensors, substrate level sensors and RF sensors which are designed to measure critical plasma parameters like Ion Flux, Ion Energy, Electron Density and Temperature as well as RF parameters like Voltage, Current, Phase, Impedance, Power, and harmonics in continuous and pulsed applications.
With a team of skilled engineers and seasoned plasma physicists, Impedans Ltd is excellently poised to offer comprehensive assistance throughout the process from the initial consultation and extending to continual maintenance and support. We ensure that our customers have access to the information and resources they need to achieve their objectives.
Contact us today to understand how we can help solve your biggest plasma measurement and control problems!
Chase House, City Junction Business Park, D17 AK6, Dublin, Ireland
info@impedans.com
www.impedans.com
Booth 39 | INL
INL is an international intergovernmental research organisation (IGRO) with the mission to perform cutting-edge research and development in interdisciplinary nanotechnology and to function as an innovation integrator in multiple application domains. Its activities focus on strategic research areas that deepen the understanding of fundamental phenomena, serving as basis for the development of innovative technologies addressing major challenges in the fields of Information and Communication Technologies, Energy and Environment, and Personalised Health and Food.
Established in 2005 under an international legal framework by a joint decision of the Governments of Portugal and Spain, INL operates since late 2010 following a total initial investment of 100 M€. It is financed by member states contributions, competitive funds from EU and national PT scientific calls, and industry collaboration and user fees. INL infrastructure provides a high-tech research environment for INL staff and users. The campus extends over an area of 47,000 m2, with 26,000 m2 of buildings, including the Research Core Facilities which consist of three units for advanced microscopy, nanophotonics, and micro and nanofabrication, certified according to ISO 9001:2015 standard and the ISO 13485:2016 in Medical Devices. At the beginning of 2024, there were over 500 employed and associated members at INL with more than 30 nationalities, 441 of them researchers.
Booth 15 | Mad City Labs
Mad City Labs manufactures high performance closed loop nanopositioning systems, precision aligned microscopy platforms for super resolution microscopy, single molecule biophysics, drift correction, light sheet microscopy, and AFM/SPM.
Featured products include low cost AFM/SPM, RM21™ single molecule microscope, low profile multi-axis nanopositioning, MicroMirror TIRF systems, MadMotor® UHV piezo motor stages, Nano-MET series of high performance metrology nanopositioners, MMP low drift micropositioning systems.